18th SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES
CHIP IN SAMPA
São Paulo, Brazil
September 8-11, 2003
ABOUT SBMicro 2003
The SBMicro is a forum dedicated to fabrication of integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of process, materials, characterization, modeling and TCAD of integrated circuits and MEMS. The proceedings are published by the Electrochemical Society in time for distribution at the conference.
Beside the traditional tutorials, regular technical sessions, round tables, working groups and exhibition, several activities are planned this year to encourage high quality contributions and enrich even more the meeting.