SBMicro 2004

19th SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES
CHIP ON THE REEFS

Porto de Galinhas, Pernambuco, Brazil
September 7-11, 2004

 

TUTORIALS

 

SBMicro
Tutorial 1 
Chair: Prof. Edval J. P. Santos
Dr. Viacheslav Kazmiruk - Institute of Problems of Microelectronics Technology, Russian Academy of Sciences, Russia.
"An introduction to the world of e-beam lithography"
9:00-11:00AM
Tutorial 2 
Chair: Prof. Renato P. Ribas
Prof. Stefan Bengtsson - Chalmers University of Technology - Sweden.
"Wafer bonding: a flexible way to manufacturing SOI materials for high perfomance applications"
2:00-4:00PM
Tutorial 3 
Chair: Prof. Jacobus Swart
Dr. William J. Schaff - Cornell University - USA.
"Molecular Beam Epitaxy - a versatile tool for industry and research"
4:30-6:30PM