SBMicro 2006 Program

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Time

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08:00

CONFERENCE OFFICIAL OPENING

Organizing committee

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Time

Title and Speaker

K1

08:50

Reiner Hartenstein, Kaiserslautern University of Technology - Germany

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Time

Title and Authors

A1

09:50

MICROSENSORS FOR MULTIPLE-PARAMETER MEDICAL MEASUREMENTS

Dafina Tanase, Johannes F.L. Goosen, Azadeh Firouzian and Patrick J. French

A2

10:10

HIGH VISCOSITY SENSING USING A LOVE WAVE ACOUSTIC PLATFORM COMBINED WITH A PDMS MICROFLUIDIC CHIP

Vincent Raimbault, Dominique Rebière, Corinne Dejous, Matthieu Guirardel, Véronique Conedera and Jacques Pistré

A3

10:40

FRACTAL CARBON-MEMS ELECTRODES: THEORY AND PRELIMINARY FABRICATION

Benjamin Park, Rabih Zaouk, Chunlei Wang, Jim Zoval and Marc Madou

A4

11:00

CHARACTERIZATION OF a-SiC:H AS MASKING MATERIAL IN MEMS APPLICATIONS

Claudia Reyes-Betanzo, Carlos Zuñiga-Islas, Arturo Pérez-Trejo, Georgina Rosas-Guevara, Adrian Itzmoyotl-Toxqui, Wilfrido Calleja-Arriaga and Alfonso Torres-Jácome

A5

11:20

A PROPOSED PROCESS TO FABRICATE STRAIN GAUGE DIRECTLY OVER THE SENSOR SUBSTRATE BY SERIGRAPHIC METHOD

Bruno Lima, Ana Silva and Nilton Morimoto

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11:40

WIRELESS SENSOR NETWORKS: REALIZING THE DREAM(Invited)

Elena Gaura, Coventry University - UK

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Time

Title and Authors

B1

14:00

CHARGE-BASED CONTINUOUS EXPLICIT EQUATIONS FOR THE TRANSCONDUCTANCE AND OUTPUT CONDUCTANCE OF SUBMICRON GRADED-CHANNEL SOI MOSFET.S

Michelly de Souza and Marcelo Antonio Pavanello

B2

14:20

FERMI PINNING IN METAL-OXIDE-SEMICONDUCTOR STRUCTURES RESULTS FROM LOW OXYGEN CONTENT AT THE METAL-OXIDE INTERFACE

Leonardo Fonseca, Andrey Knizhnik, Andrey Gavrikov, Inna Iskandarova, Alexander Bagatur´yants and Boris Potapkin

B3

14:40

EVALUATION OF TRIPLE-GATE FINFETS WITH HIGH-K DIELECTRICS AND TiN GATE MATERIAL UNDER ANALOG OPERATION

Marcelo Pavanello, Joao Martino, Eddy Simoen, Rita Rooyackers, Nadine Collaert and Cor Claeys

B4

15:00

CHANNEL LENGTH REDUCTION INFLUENCE ON HARMONIC DISTORTION OF GRADED-CHANNEL GATE-ALL-AROUND DEVICES

Rodrigo Doria, Marcelo Pavanello, Antonio Cerdeira, Jean-Pierre Raskin and Denis Flandre

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Time

Title and Authors

C1

14:00

COMPARISON OF PLASMA PARAMETERS OBTAINED WITH PLANAR PROBE AND OPTICAL SPECTROMETER

Laura Swart, Andre Daltrini, Stanislav Moshkalyov and Patrick Verdonck

C2

14:20

REACTIVE ION ETCHING OF POLYCRYSTALLINE SILICON USING THINNING TECHNOLOGY IN FLUORINE BASED MIXTURES

Alcinei Moura Nunes, Stanislav A. Moshkalyov, Peter Jürgen Tatsch and André Mascia Daltrini

C3

14:40

STUDY OF THE SILICON ETCH RATE AND MECHANISMS WHEN USING ALUMINIUM, TIN AND COPPER ELECTRODES

Patrick Verdonck and Ronaldo Ruas

C4

15:00

USE OF DISCHARGE AT NEAR ATMOSPHERIC PRESSURE FOR PLASMA ETCHING PROCESS

Jossano S.Marcuzzo, Wilfredo I.Urruchi, Marcos Massi1, Kornely Grigorov , Homero S. Maciel

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Time

Title and Authors

D1

15:50

ENERGY TRANSFER BETWEEN ALQ3 AND RHODAMINE IN A THIN SOLID FILM

Rodrigo Fazenda, Javier Ramirez and Walter Salcedo

D2

16:10

IMPACT OF THE NITROGEN CONCENTRATION OF SUB-1.3 nm GATE OXIDES ON 65 nm TECHNOLOGY TRANSISTOR PARAMETERS

Antonio Rotondaro

D3

16:30

STUDY OF TIO2 AND SIO2/TIO2 AS GATE DIELECTRIC MATERIALS

Katia Albertin, Marcio Valle and Inés Pereyra

D4

16:50

p-TYPE delta-DOPED LAYERS IN GaAs ISOLATED BY He+ BOMBARDMENT

Henri Boudinov, Giovani Pesenti, Iuri Danilov and Boris Zvonkov

D5

17:10

FABRICATION OF METAL-SEMICONDUCTOR-METAL PHOTODETECTORS USING LOW TEMPERATURE RAPID THERMAL ANNEALING

Ricardo Otha, Carlos Viana, Nilton Morimoto and BenHur Borges

D6

17:30

MEIS STUDY OF Sb IMPLANTATION IN O OR N PRE-IMPLANTED Si(001) AND SIMOX

Mateus Dalponte, Henri Boudinov, Lyudmila Goncharova, Eric Garfunkel and Torgny Gustafsson

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Time

Title and Speaker

K2

08:30

Biomimetic MEMS and NEMS Sensing Platforms-Icarus Revisted

Marc Madou, UC-Irvine - USA

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Time

Title and Speaker

K3

10:10

High Performance Silicon Mems for Niche Market Applications

Andres Lagos, Colibrys Ltd. - Neuchâtel - Switzerland

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Time

Title and Authors

E1

11:20

SEM/EDS CHARACTERIZATION OF Ni AND Ni/Pt SILICIDE FORMATION

Regis Santos, Ioshiaki Doi, Jacobus Swart and Sebastião Santos filho

E2

11:40

TRANSMITTANCE ENHANCEMENT IN TEXTURED SILICON SOLAR CELLS

Davies William de Lima Monteiro, Fernanda Honorato, Luciano Nakamura, José Roberto Tavares Branco and Thiago O. Freitas

E3

12:00

VERSATILE N-TYPE PROFILE ENGINEERING BY CONTROLLING ARSENIC SURFACE SEGREGATION IN SILICON RPCVD

Milos Popadic, Francesco Sarubbi, Tom L. M. Scholtes and Lis K. Nanver

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Time

Title and Authors

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14:00

SILICON SOLAR-CELL TECHNOLOGY (Invited)

Adriano Moehlecke, PUC-RS - Brazil

F1

14:40

DESIGN, FABRICATION AND PERFORMANCE OF MICRODEVICES FOR INFRARED DETECTION APPLICATIONS

Marcio Scarpim de Souza, Maurício Pamplona Pires, Patrícia Lustoza de Souza, Gustavo Soares Vieira, Tomas Gebhard, Karl Unterrainer and Artur Jorge da Silva Lopes

F2

15:00

CMOS ACTIVE-PIXEL STRUCTURE FOR EYE-ABERRATION DETECTION

André Santos de Oliveira Furtado and Davies William de Lima Monteiro

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Time

Title and Authors

G1

15:50

INFLUENCE OF NUCLEATION PARAMETERS IN Ge NCs FORMATION BY LPCVD

Emílio Sérgio Marins Vieira Pinto, Segundo Nilo Mestanza Muñoz, Ricardo Cotrin Teixeira and Ioshiaki Doi

G2

16:10

POLARIZATION DEPENDENCE OF PHOTOCURRENT IN InAs/InGaAs/InP QUANTUM-DOT INFRARED PHOTODETECTORS

Patricia Souza, Thomas Gebhard, Schrey Frederik, Strasser Gottfried, Unterrainer Karl, Mauricio Pires, Sandra Landi, José Maria Villas-Boas, Nelson Studart and Artur Lopes

G3

16:30

HIGH MAGNETIC FIELD AS A TOOL TO STUDY RESONANT SEQUENTIAL TUNNELING IN MULTI-QUANTUM WELLS

Gustavo Vieira and Paulo Sérgio Guimarães

G4

16:50

IMAGE RECOGNITION TASK BASED ON DECOUPLED SINGLE-ELECTRON HAMMING NETWORKS

Janaina Guimaraes, Andre Calmon and Jose Camargo da Costa

G5

17:10

EFFECTS OF NON-UNIFORM SIZE DISTRIBUTION ON THE SPECTRAL OPTICAL GAIN PROPERTIES OF InGaAs/InGaAsP QUANTUM DOTS

José Roberto Mialichi Mialichi and Newton Frateschi

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Time

Title and Authors

H1

15:50

RELATIVE HUMIDITY SENSOR BASED ON ROUGH POLYSILICON THIN FILMS

P. Zambrozi Jr., R. C. Teixeira and F. Fruett

H2

16:10

DESIGN, FABRICATION AND TESTING OF INEXPENSIVE DIFFRACTIVE OPTICAL ELEMENTS

Dirceu Semighini Filho, José Carlos Pizolato Junior, Luiz Gonçalves Neto and Patrick Bernard Verdonck

H3

16:30

RAPID PROTOTYPING OF MICROFLUIDIC SYSTEMS

Horacio Kido, Jim Zoval and Marc Madou

H4

16:50

YOUNG.S MODULUS OF a-SiC:H DETERMINED BY THE RESONANT FREQUENCY OF THERMALLY DRIVEN CANTILEVERS

Gustavo Rehder and Marcelo N. P. Carreño

H5

17:10

UV BANDPASS OPTICAL FILTER FOR MICROSPECTROMETERS

Jose Correia, Arvin Emadi and Reinoud Wolffenbuttel

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Time

Title and Authors

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14:00

HYBRID TRANSISTORS IN VERTICAL ARCHITECTURE (Invited)

Ivo Hümmelgen, UFPR - Brazil

I1

14:40

HYBRID ORGANIC/INORGANIC TRANSISTORS UTILIZONG AN INDENOFLUORENE DERIVATIVE AS EMITTER

José Pedro Mansueto Serbena, Ivo Alexandre Hümmelgen, Tayebeh Hadizab and Zhi Yuan Wang

I2

15:00

CMOS TECHNOLOGY DEVELOPMENT FOR A TOTALLY DIGITAL A/D CONVERTER

Giovani Pesenti, Ricardo Silva, Henri Boudinov, Antônio Andrade Jr, Antônio Zani, Josias Mainardi, Tiago Balen and Luigi Carro

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Time

Title and Speaker

K4

15:50

MODELING OF ADVANCED SEMICONDUCTOR DEVICES

Siegfried Selberherr, TU-Wien - Austria

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Time

Title and Authors

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10:40

A NEW ELECTRON MICROSCOPY FACILITY IN THE MOUNTAINS OF MINAS GERAIS (Invited)

Karla Balzuweit, UFMG - Brazil

J1

11:20

ANALYSIS OF SELF-HEATING EFFECT IN GRADED-CHANNEL SILICON-ON-INSULATOR nMOSFETs

Sára Elizabeth de Souza Costa, Marcelo Antonio Pavanello and João Antonio Martino

J2

11:40

RF CMOS DEVICE MODELLING FOR ON CHIP EMC EVALUATION

Ryan Rangel and José Costa

J3

12:00

INFLUENCE OF NON-VERTICAL SIDEWALL ON FINFET THRESHOLD VOLTAGE

Renato Giacomini and João Antonio Martino

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Time

Title and Speaker

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14:00

TO BE DEFINED SOON

To be defined soon

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Time

Title and Speaker

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15:00

CLOSURE SESSION

Organizing committee

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Title and Authors

Poster presenters are strongly encouraged to stand by their posters at all times indicated

P1

MICROSENSOR FOR THE MEASUREMENT OF CONCENTRATION OF LIQUID SOLUTIONS

Lucas Gonçalves Dias Mendonça and Ricardo Cury Ibrahim

P2

FABRICATION OF AN ELECTRO-OPTICAL TEMPERATURE SENSOR BASED ON SILICON OXYNITRIDE FILMS DEPOSITED BY PECVD

Gustavo Martins, Alexandre Mina and Marco Alayo

P3

SIGMA-DELTA ANALOG TO DIGITAL CONVERTER FOR USE IN LAB-ON-A-CHIP DEVICES FOR BIOCHEMICAL CLINICAL ANALYSES

G. Minas and J. G. Rocha

P4

DEVELOPMENT OF AN INTEGRATED SYSTEM FOR ELECTROCHEMICAL DETECTION

Juliana Cardoso, Marcelo Fontes and Mario Rubio

P5

AMMONIA SENSOR BASED ON POLYANILINE AND NICKEL TETRASULFONATED PHTHALOCYANINE

Cassia Massucato Nishijima Heleno and Ely Antonio Tadeu Dirani

P6

DESIGN, SIMULATION, FABRICATION AND CHARACTERIZATION OF A PRESSURE SENSOR ARRANGED IN WHEATSTONE PIEZORESISTIVE BRIDGE

Alessandro Camolesi, Pablo Souza and Fabiano Fruett

P7

MAGNETIC COMPOSITE THIN FILMS PREPARED BY SOL-GEL PROCESS

Nelcy Della Santina Mohallem, Luciana Moreira Seara and Jose Domingos Ardisson

P8

PHOSPHORUS DOUBLE-DIFFUSED EMITTER SILICON SOLAR CELLS: EMITTER AND METAL-GRID THEORETICAL OPTIMIZATIONS ON THE CONTOUR PLOT VIEW

Nair Stem and Manuel Cid

P9

ANNEALING TEMPERATURE DEPENDENCE OF 1540 NM EMISSION OF HYDROGENATED AMORPHOUS SILICON FILMS CO-DEPOSITED WITH ERBIUM

D. Figueira, D. Mustafa, L.R. Tessler and Newton Frateschi

P10

STRUCTURE AND OPTICAL PROPERTIES OF ZnO THIN FILMS PREPARED BY REACTIVE e- BEAM EVAPORATION

Milena Sabino, Vivienne Falcão, Eduardo Muniz, Antônia Sônia Diniz and José Roberto Branco

P11

FORMATION OF ANODICALLY SELF-ASSEMBLED OXIDIZED ALUMINUM FOR PHOTONIC CRYSTAL FABRICATION

Daniel Scodeler, Francisco Ramirez-Fernandez and Walter Salcedo

P12

CARBON OUTDIFFUSION FROM Ni(C)/Pt/Si STRUCTURES DURING NICKEL SILICIDE FORMATION BY RAPID THERMAL ANNEALING

Ronaldo Reis, Sebastião dos Santos, Ioshiaki Doi, Rogério Furlan and Richard Landers

P13

ANALISYS OF SILICON THICKNESS REDUCTION ON ANALOG PARAMETERS OF GC GAA SOI TRANSISTORS OPERATING UP TO 300°C

Carolina Davanzzo Gomes dos Santos, Marcelo Antonio Pavanello and João Antonio Martino

P14

SERIES RESISTANCE INFLUENCE ON THE LINEAR KINK EFFECT IN TWIN-GATE PARTIALLY DEPLETED SOI NMOSFETS

Paula Agopian, João Martino, Eddy Simoen and Cor Claeys

P15

INFLUENCE OF THE TUNNELING GATE CURRENT IN C-V CURVES

Michele Rodrigues, Victor Sonnenberg and João Antonio Martino

P16

EARLY VOLTAGE BEHAVIOR IN CIRCULAR GATE SOI nMOSFET USING 0.13 um PARTIALLY-DEPLETED SOI CMOS TECHNOLOGY

Salvador Pinillos Gimenez, Rodrigo Mazzutti and João Antonio Martino

P17

DESIGN AND SIMULATION OF A THYRISTOR SURGE PROTECTIVE DEVICE FOR TELECOMMUNICATION SYSTEMS

Roberto Lacerda de Orio, Jacobus Willibrordus Swart and Wanderley Marzano

P18

STUDY OF MODE TRANSITIONS IN INDUCTIVELY COUPLED PLASMAS

Andre Daltrini, Stanislav Moshkalyov, Marcelo Monteiro, Munemasa Machida and Edmilson Besseler

P19

EFFECTS OF THE SECONDARY ELECTRON EMISSION COEFFICIENT ON THE GENERATION OF CHARGED PARTICLES IN RF OXYGEN DISCHARGE

Marisa Roberto, John Verboncoeur, Patrick Verdonck and Elias Cizzoto

P20

GLOBAL MODEL IN LOW-PRESSURE OXYGEN DISCHARGES

Geraldo Roberson, Marisa Roberto, John Verboncoeur and Austin Minnich

P21

CONTROLLED DEPOSITION OF CARBON NANOTUBES BY DIELECTROPHORESIS FOR MICRO AND NANODEVICES

Jorge Augusto León Eras, Mario Antonio Bica de Moraes, Carla Veríssimo and Stanislav Moshkalyov

P22

SIGNAL CLASSIFIER BASED ON STOCHASTIC ASSOCIATIVE SINGLE-ELECTRON CIRCUITS

Helen Carmo, Janaina Guimaraes and Jose Camargo da Costa

P23

COUPLING OF A CMOS OPTICAL SENSOR TO A MICROMACHINED DEFORMABLE MIRROR WITH AN ADALINE NEURAL NETWORK

Davies William de Lima Monteiro, Antônio Isidório Ferreira Jr., Frederico B. Teixeira, João Guilherme M. Melo and Gleb Vdovin